HIGH VOLTAGE ESC POWER SUPPLY

Dual 0V to ±5kV DC bipolar outputs, at up to 2mA / 10 watts per output.

Floating output return / center tap. Can be biased at up to ±250V DC.

Programmable output offset voltages.

Programmable arbitrary de-chucking output waveforms to help minimize the difficulties in de-chucking substrates.

Fast reversal of outputs via solid state switches with programmable ramp rates.

Solid state output voltage discharge clamps.

Output polishing filters to help protect the unit against the effects of RF.

Output voltage and current monitors.

Floating output return / center tap voltage monitor.

Output capacitance and resistance measurements.

Wafer status detection with programmable capacitance or current thresholds.

High precision, low ripple and noise outputs.

Arc and short circuit protection.

Remote control and monitoring via analog, RS232/485 and Ethernet interfaces.

Local control and monitoring via front panel buttons, OLED display and LED indicators.

1U 19" rack mountable enclosure.

Convection cooled.

High reliability / MTBF

Serial and Ethernet Communications GUI