HIGH VOLTAGE ESC POWER SUPPLY
The HES ESC Power Supply is a high voltage system with floating bipolar outputs capable of delivering up to 10kVDC (+/-5000V). The output polarity is reversible via the remote interfaces. It has a 3 pin TE MATE-N-LOCK non-reversible quick disconnect 24VDC input. SHV connectors are used for the HV outputs, and an MHV for the center tap return.
The HES Power Supply is an ideal electrostatic high voltage power supply designed to drive the electrodes of monopolar or bipolar, Coulomb and Johnsen Rahbek (JR) electrostatic chucks in a controllable rack mount package.
features and benefits
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Dual 0V to ±5kV DC bipolar outputs, at up to 2mA / 10 watts per output.
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Floating output return / center tap. Can be biased at up to ±250V DC.
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Programmable output offset voltages.
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Programmable arbitrary de-chucking output waveforms to help minimize the difficulties in de-chucking substrates.
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Fast reversal of outputs via solid state switches with programmable ramp rates.
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Solid state output voltage discharge clamps.
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Output polishing filters to help protect the unit against the effects of RF.
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Output voltage and current monitors.
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Floating output return / center tap voltage monitor.
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Output capacitance and resistance measurements.
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Wafer status detection with programmable capacitance or current thresholds.
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High precision, low ripple and noise outputs.
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Arc and short circuit protection.
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Remote control and monitoring via analog, RS232/485 and Ethernet interfaces.
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Local control and monitoring via front panel buttons, OLED display and LED indicators.
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1U 19" rack mountable enclosure.
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Convection cooled.
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High reliability / MTBF
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Serial and Ethernet Communications GUI
specifications
产品描述
产品描述
高级叉指型电调
夹紧的基板材料
硅、蓝宝石、玻璃
电极间隙
≥ 0.3mm
击穿电压
> 20 千伏/毫米
典型工作电压
± 1000 V 至 ± 4000 V
夹紧力/压力
> 50 Torr，< 2 sccm 气体泄漏率
释放和夹紧时间
< 1 秒
释放和夹紧时间
< 1 秒
释放和夹紧时间
< 1 秒
产品描述
释放和夹紧时间
< 1 秒
释放和夹紧时间
< 1 秒
释放和夹紧时间
< 1 秒
释放和夹紧时间
< 1 秒
释放和夹紧时间
< 1 秒
MECHANICAL DETAILS
