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electrostatic chuck

Hybrid Electrostatic Chucks 

With over 25 years of experience, Hybrid Electrostatic (HES) Industries, LLC. applies a consultative approach to deliver personalized ESC's that meet and exceed customers expectations.

electrostatic chucks

  • Wide range of electrostatic chucks for semiconductor tools such as CVD, Plasma etch, ion implant, and metrology.

  • Chucks range in size from 100mm to 450mm.

  • HES Industries, LLC. designs, manufactures, and completely tests these products for field proven performance as required by each customer.

  • Proven for high purity, low-particle generation, and long process life.

  • HES Industries works with its customers to develop complete solutions for complex product development.

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innovative manufacturing

HES Industries employs a dedicated R&D and engineering staff that is committed to providing each customer with individualized service and design to produce an electrostatic chuck (ESC) that meets their application.

Hybrid esc with interdigitated electrode design

There is a high demand in some semiconductor processes to clamp dielectric substrates such as sapphire, glass, and more. HES Industries has developed new interdigitated electrode

designs and manufacturing processes. This advanced design and manufacturing methodology allows customers to choose an optimal design based on their specific process requirements.

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MATERIALS AND PERFORMANCE PARAMETERS

HES Industries is dedicated to provide continued development for new material processing. Please see the table for additional information or contact us directly.

GET IN TOUCH FOR ADDITIONAL INFORMATION

Thank you! A member of our team will be in touch soon.

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