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Ceramic esc properties

CRITERIA

SPECIFICATIONS

Purity

> 99.9%

Porosity

< 2%

Hardness (HV0.3)

> 800

Thermal Conductivity m-K

> 30

Adhesion Strength (PSI)

> 6000

Dielectric Constant @ 1MHz

7.2~7.5 @ 1MHz

Dielectric Strength (kV/mm)

> 20

Volume Resistivity (Ω•cm) @ RT

> 1.0 X 10E15

Current Leakage @ 4kV (μA)

< 0.25μA at 0.25mm thick

ESC Clamping Voltage

+/- 1kV to +/- 4kV

Clamping Force

> 50 Torr

Helium Leak Rate

< 1sccm

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