HIGH VOLTAGE ESC POWER SUPPLY
The HES ESC Power Supply is a high voltage system with floating bipolar outputs capable of delivering up to 10kVDC (+/-5000V). The output polarity is reversible via the remote interfaces. It has a 3 pin TE MATE-N-LOCK non-reversible quick disconnect 24VDC input. SHV connectors are used for the HV outputs, and an MHV for the center tap return.
The HES Power Supply is an ideal electrostatic high voltage power supply designed to drive the electrodes of monopolar or bipolar, Coulomb and Johnsen Rahbek (JR) electrostatic chucks in a controllable rack mount package.
features and benefits
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Dual 0V to ±5kV DC bipolar outputs, at up to 2mA / 10 watts per output.
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Floating output return / center tap. Can be biased at up to ±250V DC.
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Programmable output offset voltages.
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Programmable arbitrary de-chucking output waveforms to help minimize the difficulties in de-chucking substrates.
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Fast reversal of outputs via solid state switches with programmable ramp rates.
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Solid state output voltage discharge clamps.
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Output polishing filters to help protect the unit against the effects of RF.
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Output voltage and current monitors.
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Floating output return / center tap voltage monitor.
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Output capacitance and resistance measurements.
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Wafer status detection with programmable capacitance or current thresholds.
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High precision, low ripple and noise outputs.
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Arc and short circuit protection.
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Remote control and monitoring via analog, RS232/485 and Ethernet interfaces.
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Local control and monitoring via front panel buttons, OLED display and LED indicators.
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1U 19" rack mountable enclosure.
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Convection cooled.
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High reliability / MTBF
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Serial and Ethernet Communications GUI
specifications
Output E1 & E2
Voltage Ranges
0V to ±5kV DC wrt floating output return / center tap (CT).
Max Current / Power
2mA / 10 watts per output.
Output Polarities
Bipolar wrt other output.
Floating Output Return / CT
Can be referenced to earth/chassis or biased at up to ±250V DC wrt earth.
Programmable Offset
Within the output voltage range, a positive or negative offset voltage can be simultaneously applied to each output.
De-chucking
Programmable arbitrary de-chucking waveform. Programmable slew rate ms to s. Output voltage discharge clamps.
Capacitance Monitoring
O/P to O/P and O/P's to floating output return / center tap. 0 to 10nF and 0 to 30nF ranges.
Resistance Monitoring
O/P to O/P and O/P's to floating output return / center tap (100KΩ to 10MΩ).
Arc Protection
The unit is protected against occasional arcs. Repeated arcs will cause the outputs to shut down.
Input Supply
Voltage
+24VDC ±5% Control & Monitoring:
Control
Interlock, O/P voltages, O/P polarity, O/P current limits, HV on/off, Alarm reset, Cmon on/off, Rmon on/off
Monitoring
O/P voltages, CT voltage, O/P currents, O/P capacitances, O/P resistances, HV on/off status, polarity status, alarm status, wafer status, +15V supply.
Remote Interfaces
Analog, RS232/485 and Ethernet. Full control and monitoring.
Local Interface
Front panel LED's, buttons and OLED display. Limited control and monitoring.
MECHANICAL DETAILS
