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Material and performance parameters
Product Description
Advanced Interdigitated Electrode ESC
Clamped Substrate Material
Silicon, Sapphire, Glass, GaAs, SoG
Electrode Separation
≥ 0.3mm
Breakdown Voltage
> 20 kV/mm
Typical Operation Voltage
± 1000 V to ± 4000V
Clamping Force/Pressure
> 50 Torr with < 2 sccm Helium Leak Rate
Release & Clamp Time
< 1s
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