HYBRID ESC WITH INTERDIGITATED ELECTRODE DESIGN
Our engineers work cooperatively with customers to provide an optimized total ESC solution for improved tool performance. Our proprietary manufacturing process enables HES Industries to fabricate ESCs from 100 mm to 450 mm with customer specified geometries. All ESCs feature high clamping forces, quick chuck and de-chuck times, and anti-arc design for high bias application.
HES Industries provides customers clamping capability of a wide variety of materials that are not only conductive but also dielectric such as Glass and Sapphire. All ESC's are tested to fully meet customer specifications.
The table below outlines the capabilities of our ESCs. To learn more about our electrostatic chuck fabrication services, please feel free to contact us directly for additional information.
Size & Geometry
100 mm - 450 mm; Custom design base plate
Material
Anodize Aluminum, Alumina, DLC, SiN, SiO2, Ti
Electrode Designs
Monopole, Bipole, Multi-pole, Interdigitated
Geometric Tolerances
Flat and parallel .0002 - .0004 inch (< 5μm - 10μm)
Surface Finish
Wafer clamping surface <2μ inch Ra (0.05μm)
Surface Patterning
Custom mesa pattern to reduce particle transfer
Refurbishments
Ceramic ESC surface cleaning, removal & replacement
Inspection & Performance Testing
Dimensional accuracy, Electrical performance, Vacuum integrity, Backside gas leakage, wafer clamping and release
Analysis Capability
Thermal & Electrical Performance, SEM & EDX using FEM & CFD
Production Volume
Prototype to High Volume
Additional Information
Industry Focus
Tool Manufacturers
Semiconductor
Lithography
Solar
LED
MEMS
Applications
Etch Process
HPD-CVD and PVD
Ion Implantation
Metrology
Dielectric Substrates (LED and Solar Applications
Industry Standards
Compliant to Major OEM Specifications including Quality, Packaging, Performance, and Cleanliness
File Formats
Available to import most software; Solidworks, IGES, STEP, DXF